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System platform: desktop or standalone.
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Wafer loading: desktop: manual; standalone: manual or automated.
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Wafer size: desktop: 2", 3", 4" (options: any size up to 8" or 12"); robot system: 2"-6" (with potential to 8 inches).
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System test functions: EL, PL, EL/PL combination, IV, reverse, warpage, film thickness, etc.
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Probe type: Type I, Type IA, Type II, Type IIA, Type IIB, Type IIC, and Type SiA.
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Targeted material: LED epiwafers, nearly any type of semiconductor-based light-emitting material systems.
EpiEL mapping system has been
extensively tested on nitride-based material systems; please check with MaxMile for other types of material systems.
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Light detection: standard for transmission mode; reflection
mode will be optional (for samples with opaque substrates).
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Test mode: quick or mapping.
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EL test protocol: curve or point.
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Test speed: 0.5-12 minutes, depending on test functions and their configurations.
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Sampling points: number of sampling points and
optical/electrical measurements for each point can be specified by
end user. User can generate own test point arrangement.
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Wavelength detection: UV/VIS/NIR, or customized range.
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Spectral resolution: 0.5-2 nm, depending on spectral range configuration.
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Excitation sources:EL: electrical; PL: 405nm standard, please contact MaxMile for other excitation sources.
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Current measurement: >10e-12A.
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Type of curves: Characterizations provided by MaxMile EpiEL systems.
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Type of mappings: Characterizations provided by MaxMile EpiEL systems.
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Mapping color encoding: rainbow, gradient,
binary, temperature, gray, or any type specified by end user.
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Report generation and data presentation: HTML (Brief/Abbreviated/Full), XML, CSV, TXT (Each kind of report is configurable. Software can be customized to meet specific report need).
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Control unit and OS: PC-based EpiEL station run on MS Windows 7 (32bit or 64 bit).
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Power supply: 20A/110VAC or 10A/220VAC; Vacuum needed for robot system.
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Recommended Ambient Condition: temperature: 15'C-30'C, humidity: 40%-70% without condensation.
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Other robot system features: wafer alignment: yes; cassette wafer mapping: yes; cassette auto check: yes.
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System Dimension: desktop: 4 inches: 18"(w)x18"(d)x14"(h), 8 inches: 24"(w)x24"(d)x14"(h); robot system: MaxMile robot: 32"(w)x32"(d)x68"(h); commercial robot: 57"(w)x32"(d)x68"(h).
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Options: EpiEL station: desktop or standalone; Size of desktop EpiEL station: 4 or 8 inches; Robot configuration: commercial or MaxMile; Dual EL detection (EpiEL-700); PL Option; Film thickness, etc. (Note: warpage and reverse test will be a standard configuration of EpiEL system).
