Configuration of MF Probes
MaxMile Technologies developed
various MF probe configurations to meet different customer
needs, which include:
-
Contact configuration: single contact,
double contacts, or combination contact.
-
Contact size: 0.8-2 mm, can be
customized.
-
Probe control: manual, automatic and
mapping.
-
Stage diameter: 2"(50mm)-12"(300mm).
-
Interface: can be custom-designed for any
meters.
Note: A single contact MF probe makes
measurement through the material substrate, while a double
contact probe makes measurement through two contacts on one
side of semiconductor samples with
semi-insulating or insulating substrates. A combination probe
incorporates both single and double contact configurations.
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