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EpiEL
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Desktop 4 Inches
Desktop 8 Inches
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MaxMile Robot I system
EpiEL-700
Deep UV LED epi-wafer test
GaN/Si option
Instant device formation and electrical test
Wafer bowing or warpage test
How to establish the correlation between EpiEL test and device result
EpiEL Brochure (PDF)
EpiEL Probes (PDF)
An example of auto-generated HTML report
Brief technical specification (PDF)
Characterizations provided by MaxMile EpiEL systems
EL vs. PL (PDF)
FAQ-frequently asked questions
To learn more about MaxMile EpiEL, PL, or EL/PL Combination technologies:
EpiEL---LED epi-wafer electroluminescence mapping systems
EL/PL---LED epi-wafer electroluminescence/photoluminescence combination mapping systems
PL---Photoluminescence mapping systems
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