MaxMile Robot I System
MaxMile Robot I System is a fully loaded, compact wafer test platform which integrates
wafer transportation robot, wafer aligner, wafer clamping robot, and cassette station
as a whole unit. It supports only one cassette station. At a default configuration,
MaxMile Robot I system can handle wafer size from 2" to 8" without any hardware change.
It has an option to support wafer size up to 12".
With latest solutions from industry, all key components including system platform, wafer
transportation robot, wafer aligner, wafer clamping robot, and cassette station were
designed from scratch with emphasis on functionality, reliability, simplicity, and novelty:
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System can initialize its entire configuration automatically after each key component passes
physical hardware check.
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A very compact fully loaded robot system which handle wafer size from 2" to 8", without
need to change any hardware to test different wafer sizes.
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System supports auto cassette detection, cassette wafer mapping, and wafer alignment.
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System supports various kinds of cassettes. System detects cassette setting and robot setting
automatically, and corresponding tedious robot teaching is eliminated.
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Unique wafer clamping robot design supports wafer size from 2" to 8", with potential up to 12".
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Very affordable in system and service.
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